Transfer module and vacuum evaporation equipment

The utility model discloses a transfer module and vacuum evaporation equipment relates to vacuum evaporation coating technique field to detach the foreign particles on the transfer module inner wall effectively, reduce the defective rate of base plate coating by vaporization. The transfer module includes the cabin body and sets up at the internal gas tube in cabin, still including being fixed in the motor of the lateral wall of the cabin body, the motor with the one end of gas tube is connected, electromotor drive the gas tube is around self axial rotation. Vacuum evaporation equipment includes the transfer module that above -mentioned technical scheme carried. The utility model provides a transfer module and vacuum evaporation equipment is used for display substrates's manufacturing. 本实用新型公开种过渡舱及真空蒸镀设备，涉及真空蒸镀技术领域，以有效地除去过渡舱内壁上的杂质颗粒，降低基板蒸镀的不良率。所述过渡舱包括舱体以及设置在舱体内的充气管，还包括固定于所述舱体的侧壁的电动机，所述电动机与所述充气管的端连接，所述电动机驱动所述充气管绕自身轴向旋转。所述真空蒸镀设备包括上述技术方案所提的过渡舱。本实用新型提供的过渡舱及真空蒸镀设备用于显示基板的制造。