Silicon chip breakage detection equipment

The utility model discloses a silicon chip breakage detection equipment, include: the frame for carry a conveying unit, the 2nd conveying unit and the 3rd conveying unit of silicon chip in proper order backward, be used for detecting the damaged detecting element of silicon chip, be used for collecting the damaged box of collecting of damaged silicon chip, collect the unusual collection box of silicon chip when being used for the unit exception. Detecting element, a conveying unit, the 2nd conveying unit and the 3rd conveying unit all are connected with a controller. The utility model discloses can carry out online automated inspection in batches to regular silicon chip, and can automatically process the silicon chip according to the detected signal, equipment structure is simply coherent, can effectively improve the complete degree and production machining efficiency of silicon chip.