Warpage wafer loader

The utility model provides a warpage wafer loader, warpage wafer loader includes the wafer box, all is equipped with on the inner wall of wafer box both sides to be suitable for the protruding structure of placing the wafer, warpage wafer loader is still including being fixed in the strutting arrang...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI XIAOJIN, JIAN ZIJIE, NIAN SIJUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a warpage wafer loader, warpage wafer loader includes the wafer box, all is equipped with on the inner wall of wafer box both sides to be suitable for the protruding structure of placing the wafer, warpage wafer loader is still including being fixed in the strutting arrangement on the wall behind the wafer box, strutting arrangement includes baffle and backing sheet. Through set up bearing structure in the wafer box, can directly put into the wafer box with the wafer after grinding and can realize preventing that the wafer warping from taking place, need not extra strorage device, through the quantity of adjustment backing sheet among the bearing structure, can deposit the wafer of corresponding different quantity, deposit when realizing the multi -disc wafer, because the utility model discloses a warpage wafer loader is based on the wafer box, and comparison convenient and fast is put in getting of wafer.