Panel installation tool

The utility model provides a panel installation tool belongs to the semiconductor technology field. The utility model discloses a panel installation tool includes the frame, the frame is used for hoisting panel fixedly, still includes at least one correction unit, correct the unit include the backup...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG XUNZE, PIAO XIANGXIU, WANG ZHAOBO, WANG XIAOKUN, DING DONG, ZHANG WENJUN, WEN QINGLIANG, LYU LEILEI, SHA LEI, WANG HUALU, ZHANG ZHUORAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model provides a panel installation tool belongs to the semiconductor technology field. The utility model discloses a panel installation tool includes the frame, the frame is used for hoisting panel fixedly, still includes at least one correction unit, correct the unit include the backup pad and with the perpendicular correction module that sets up of backup pad, the backup pad set up in inside the frame, it can be relative to correct the module the perpendicular reciprocating motion in plane at backup pad place is with right panel carries out the face and corrects. The utility model discloses a panel installation tool can carry out the face correction to the copper backplate of installing on the magnetron sputtering filming equipment to make all mounting screws homoenergetics enough be connected with the copper backplate, avoid existing and connect fixed mounting screws collision magnet, cause the magnet damage.