Dielectric plate plasma generator
The utility model discloses a dielectric plate plasma generator, including the dielectric plate, go up medium pipe and medium pipe down, the dielectric plate be pottery or quartzy material structure, goes up medium pipe and medium pipe down for polytetrafluoroethylene material structure, goes up the...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model discloses a dielectric plate plasma generator, including the dielectric plate, go up medium pipe and medium pipe down, the dielectric plate be pottery or quartzy material structure, goes up medium pipe and medium pipe down for polytetrafluoroethylene material structure, goes up the medium pipe and is half opening form with medium pipe down, goes up the medium pipe and is parallel to each other with medium pipe down and sets up respectively in the top and the below of dielectric plate, goes up medium pipe and the lower intraductal electric conductor that all is provided with of medium, high -frequency voltage is applyed in drawing forth of electric conductor between the end. Its simple structure, the manufacture craft degree of difficulty is low, and corrosion resistance is good, has more stable plasma discharge performance, and is longe -lived. |
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