Efficiency monitoring device

The utility model discloses an efficiency monitoring device, including speed monitoring device and displacement monitoring device, speed monitoring device includes speed sensor and emitting diode, and displacement monitoring device includes a displacement sensor and the 2nd displacement sensor, speed monitoring device is located the side of fixed disk and polishing pad renovation ware to aim at polishing pad renovation ware, displacement monitoring device is located the top of fixed disk to aim at fixed disk and polishing pad. The utility model discloses an advantage and beneficial effect lie in: realize the trouble or the inefficacy of timely discovery polishing pad renovation ware and renovation equipment, reduced polishing pad renovation ware and make the virtual work, improved production efficiency's effect, and played accurate control polishing pad renovation ware running situation and efficiency and detectd the inadvertent doubling ahead of time and in time pinpoint the problems and know efficiency decline range, reduce the frequency of shutdown inspection maintenance, the effect that improves production efficiency.