Single crystal growing furnace anti -explosion safety device

The utility model provides a be provided with on the pipeline of managing to find time and take out air filter and vacuum pump of single crystal growing furnace anti -explosion safety device, the single crystal growing furnace to utilize the volatile substance of vacuum pump in with the single crystal growing furnace inhale manage to find time the pipeline with take out air filter in, anti -explosion safety device includes with the gas transmission pipeline of the pipeline intercommunication of managing to find time, sets up control valve, gas flowmeter and air cleaner on gas transmission pipeline. The utility model discloses a gas transmission pipeline conveying air in to the pipeline of managing to find time to the messenger manages to find time the pipeline and the volatile substance taken out in the air filter obtains abundant oxidation, has avoided taking place burning and explosion when taking out air filter cleaning the pipeline of managing to find time, in addition, set up on gas transmission pipeline in air cleaner can prevent effectively that foreign particles in the air from getting into the single crystal growing furnace, simultaneously, set up gas flowmeter and can get into the air quantity in the gas transmission pipeline by the close check.