Single crystal growing furnace is self -cleaning filter for vacuum system

Single crystal growing furnace is self -cleaning filter for vacuum system

Single crystal growing furnace is self -cleaning filter for vacuum system, including arranging filtration jar between single crystal growing furnace and the vacuum pump in, fixing at the cartridge filter that filters jar and can follow cartridge filter circumferencial direction pivoted frush sweeper...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN ZIMENG, SUN JINZHAO, PENG TAO, JIAO ERQIANG, WANG SONGTAO, SI PENGHUI
Format: Patent
Sprache:eng
Schlagworte:
AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SEPARATION
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
TRANSPORTING
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:Single crystal growing furnace is self -cleaning filter for vacuum system, including arranging filtration jar between single crystal growing furnace and the vacuum pump in, fixing at the cartridge filter that filters jar and can follow cartridge filter circumferencial direction pivoted frush sweeper, the frush sweeper can rotate the clean cartridge filter surface of in -process at the circumference. Being equipped with the cartridge filter and can following cartridge filter circumferencial direction pivoted frush sweeper in filtering the jar, the frush sweeper can rotate the clean cartridge filter surface of in -process at the circumference for the gaseous granule entering vacuum pump that the in -process production was drawd to the prevention silicon single crystal causes the vacuum pump to damage, simultaneously, self -cleaning had both practiced thrift the manpower, avoided the injury of poisonous and harmful material to personnel again.