Vacuum sputter coating device

The utility model discloses a vacuum sputter coating device, including vacuum cavity, positive pole, air inlet, delivery roll, negative pole target and negative pole, the vacuum cavity is formed by connecting first the U -shaped negative pole apron and the U -shaped sun plate frame of lower half, co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAN DULUN, WANG KEBIN, TANG GUIMIN, WU XIBIAO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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