Vacuum sputter coating device

The utility model discloses a vacuum sputter coating device, including vacuum cavity, positive pole, air inlet, delivery roll, negative pole target and negative pole, the vacuum cavity is formed by connecting first the U -shaped negative pole apron and the U -shaped sun plate frame of lower half, connector plates is installed through the bolt in the inboard of negative pole apron, and connector plates's inboard the welding has stainless steel meshwork, a plurality of delivery rolls are installed to the bottom of vacuum cavity, are fixed with the fixed plate between the delivery roll, and the fixed orifices that the fixed plate passes through on the fixed plate is fixed in positive plate frame's bottom, be fixed with collets through the fastener on the fixed plate, the both sides of collets are fixed with the curb plate through the fastener, and the top of collets is fixed with the base plate through the fastener, the inside of vacuum cavity is equipped with multiunit bilateral symmetry's air inlet. This vacuum coating device has not only reduced dropping of sputter material, has guaranteed insulating nature, can adapt to different technological requirements moreover.