Be used for abluent combination formula of silicon chip to load spool box
The utility model provides a be used for abluent combination formula of silicon chip to load spool box, belongs to the production field of silicon single crystal flake, constitute by overcoat spool box and the built-in spool box that loads 4 inches silicon chips, and built-in spool box with can dism...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model provides a be used for abluent combination formula of silicon chip to load spool box, belongs to the production field of silicon single crystal flake, constitute by overcoat spool box and the built-in spool box that loads 4 inches silicon chips, and built-in spool box with can dismantlement mode nestification in the overcoat spool box. The utility model discloses a set up built-in spool box in the overcoat spool box, load 4 inches silicon chips and realized the compatibility of cleaning machine to 4 inches silicon chips in built-in spool box, realized the compatibility of cleaning machine to three kinds of size silicon chips, simple manufacture, convenient to use has avoided additionally purchasing the cleaning machine and has rinsed the cost promotion that not unidimensional silicon chip results in. |
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