Full automatic test system of encapsulation wafer array microprobe
The utility model discloses a full automatic test system of encapsulation wafer array microprobe, include motion platform, hold piece platform, vision module, motion control card, probe card module, four-wire type wire rod test machine and computer, wherein, hold piece platform, vision module and pr...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The utility model discloses a full automatic test system of encapsulation wafer array microprobe, include motion platform, hold piece platform, vision module, motion control card, probe card module, four-wire type wire rod test machine and computer, wherein, hold piece platform, vision module and probe card module and install on motion platform, along with motion platform moves together, motion control card control motion platform's motion, probe card module is connected with four-wire type wire rod test machine, and the computer is connected with motion control card and four-wire type wire rod test machine. |
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