Base plate carrying tool

The utility model relates to a base plate carrying tool, include: the framework is configured as and holds the base plate in wherein and the supporting substrate, wherein said framework includes a plurality of anchor clamps, is used for fixing said base plate in in the said framework, and the track, attach connect in said framework, wherein but the track is including the magnetism material, the surface of framework and the track includes the compatible material of plasma. According to the utility model discloses the process chamber includes with compatible material encapsulation, coating or the part of making in clean- plasma. According to the utility model discloses base plate carrying tool can make or coat by compatible material in clean- plasma. According to the embodiment of the utility model provides a, the clean action of plasma can be carried out in having one or more base plate carrying tool's process chamber, and these base plate carrying tool do not bear any base plate to clean this one or more base plate carrying tool and cavity part.