Plasma source

The utility model discloses a plasma source, include: be used for producing the electronic negative pole, the heater, the heater set up in said negative pole below, it is right the negative pole heats, be used for receiving electron that the negative pole produced produces plasma's positive pole pipe, the positive pole pipe oxygenates ring and steel loop including the aluminium ring, said aluminium ring, said oxygenate the ring and the surface of steel loop is equal is provided with the isolation layer, the isolation layer is used for keeping apart said plasma with said aluminium ring, said oxygenate the ring and the contact of said steel loop. The utility model discloses a said aluminium ring, said oxygenate the ring and the surface of said steel loop all is provided with the isolation layer, has stopped the metal effect of bombarding in the big density plasma antianode pipe that the positive pole pipe produced, has avoided sparking phenomenon, has protected the metal surface among the plasma source not receive the pollution