Surface blemish optical detection device
The utility model discloses a surface blemish optical detection device, detection device includes: laser instrument, polarizer, beam expanding lens, first polarization spectroscope, shearing prism, scanning mirror surface, heart scanning lens far away, total mark ball optical collector, a photoelect...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model discloses a surface blemish optical detection device, detection device includes: laser instrument, polarizer, beam expanding lens, first polarization spectroscope, shearing prism, scanning mirror surface, heart scanning lens far away, total mark ball optical collector, a photoelectric detector, wave plate, second polarization spectroscope, the 2nd photoelectric detector, laser instrument, polarizer, beam expanding lens set gradually, it sets up between first polarization spectroscope and scanning mirror surface to shear the prism, it makes the incident light falld into the equal part of polarization quadrature of two bundles of light intensity to cut setting up of prism to have between two bundles of light and form a very little contained angle on the back coke side of heart scanning lens far away, the wave plate sets up between first polarization spectroscope and second polarization spectroscope, and the second polarization spectroscope is connected with the 2nd photoelectric detector. The utility model provides a surface blemish optical detection device can improve the detection precision and the efficiency of surface blemish. |
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