Aspheric interference detection apparatus based on sub-aperture stitching method and computer-generated hologram method
An aspheric interference detection apparatus based on a sub-aperture stitching method and a computer-generated hologram method relates to an apparatus for obtaining the roughness of the surface of an aspheric optical element by using a sub-aperture stitching method and a computer-generated hologram...
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Sprache: | eng |
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Zusammenfassung: | An aspheric interference detection apparatus based on a sub-aperture stitching method and a computer-generated hologram method relates to an apparatus for obtaining the roughness of the surface of an aspheric optical element by using a sub-aperture stitching method and a computer-generated hologram method, and belongs to the optical detection field. The apparatus helps to solve the problems that a conventional interferometry is low in precision, slow in speed and long in time when measuring aspheric optical elements. The aspheric interference detection apparatus includes an He-Ne laser, a first reflective mirror, a second reflective mirror, a third reflective mirror, a collimator, a beam expanding lens, a first collimating lens, a second collimating lens, a third collimating lens, a spectroscope, an aspheric optical element, a stepping motor, a polarizer, a liquid crystal light valve, a computer, a liquid crystal light valve drive circuit, a polarization analyzer and a CCD. The stepping motor is arranged below the aspheric optical element. Calibers of the aspheric optical element are all measured through rotation of the stepping motor. The aspheric interference detection apparatus is used for detecting the roughness of the surface of the aspheric optical element. |
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