TFT glass platinum defect elimination device
The utility model relates to the field of TFT glass preparation, and in particular relates to a TFT glass platinum defect elimination device comprising a nitrogen system, a clarified air system, a mixed gas regulation system and a platinum pipe provided with mixed gas inlet and outlet. The nitrogen...
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Zusammenfassung: | The utility model relates to the field of TFT glass preparation, and in particular relates to a TFT glass platinum defect elimination device comprising a nitrogen system, a clarified air system, a mixed gas regulation system and a platinum pipe provided with mixed gas inlet and outlet. The nitrogen system comprises a nitrogen source, a first pressure adjustment device and a first heating device which are connected sequentially. The clarified air system comprises a clarified air source, a second pressure adjustment device and a second heating device which are connected sequentially. Gas outlets of the first and second heating devices are respectively connected with the gas inlet of the mixed gas regulation system. The gas outlet of the mixed gas regulation system is connected with the mixed gas inlet of the platinum pipe. With the device provided by the utility model, the reaction of platinum and harmful gases such as oxygen ions in the platinum channel is effectively reduced, the occurrence rate of platinum defect is reduced, and the service life of the platinum channel is effectively prolonged. With the device, the platinum defective ratio can be reduced by more than 20%, and the service life of the platinum channel can be prolonged by more than half a year. |
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