Mask plate

The utility model discloses a mask plate which comprises a coated opening area and an uncoated area, wherein the uncoated area is distributed on the periphery of the coated opening area. The mask plate is characterized in that thinning areas symmetrically distributed relative to the coated opening a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	RAN YINGGANG, SU JUNHAI, WU JUNXIONG, MA DEGUI, KE XIANJUN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a mask plate which comprises a coated opening area and an uncoated area, wherein the uncoated area is distributed on the periphery of the coated opening area. The mask plate is characterized in that thinning areas symmetrically distributed relative to the coated opening area are arranged on the uncoated area. According to the mask plate disclosed by the utility model, as the thinning areas are manufactured on the periphery of the coated opening area, the tensile deformation of the mask plate in the process of tensioning the mask plate is absorbed, so that the precision of the coated opening area is ensured.