Solid distillation and purification device for solid-state MO source

The utility model relates to a solid distillation and purification device for a solid-state MO source. A distillation kettle is arranged in a distillation kettle heating system, a distillation tower is connected to the distillation kettle, a system cooling and reflux ratio control system is connecte...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JI MINKUN, LU PING, XU CONGYING, CHEN HUABING, SHI JUNMIN, PAN XINGHUA, CAI YANQING, SUN XIANGZHEN, ZHANG LI
Format: Patent
Sprache:eng
Schlagworte:
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