Plate-type PECVD copper antenna detection tool

A plate-type PECVD copper antenna detection tool comprises a tool body. The tool body has a big round through hole and a small round through hole. The internal diameter of the big round through hole is equal to the upper limit of the standard diameter of a copper antenna body. The internal diameter...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	XIAO CUNYONG, FENG YONGQING, SU ZHANCHENG, WEN YUNJIA, ZHANG LINLIN
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A plate-type PECVD copper antenna detection tool comprises a tool body. The tool body has a big round through hole and a small round through hole. The internal diameter of the big round through hole is equal to the upper limit of the standard diameter of a copper antenna body. The internal diameter of the small round through hole is equal to the upper limit of the standard diameter of the insertion end of a copper antenna. The detection tool can directly detect copper antennas, and a worker does not need to take the copper antennas back to a production site to detect the antennas one by one. Compared with the prior art, the detection tool is quicker and more convenient, will not allow production to be delayed, helps to shorten the maintenance time and improve the productivity, and enables costs to be reduced.