Array substrate structure and contact structure

The utility model discloses an array substrate structure and a contact structure. The contact structure comprises a substrate, an active layer, an insulating layer, an interlayer dielectric layer, a contact substrate opening and a conducting layer, wherein the active layer is positioned on the subst...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LIU YOUZONG, YAN CHONGWEN
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The utility model discloses an array substrate structure and a contact structure. The contact structure comprises a substrate, an active layer, an insulating layer, an interlayer dielectric layer, a contact substrate opening and a conducting layer, wherein the active layer is positioned on the substrate; the insulating layer is positioned on the active layer; the interlayer dielectric layer is positioned on the insulating layer; the contact substrate opening penetrates through the interlayer dielectric layer and a part of the insulating layer and exposes a part of the active layer, wherein the contact substrate opening comprises a first notch part, and the first notch part is defined by a bottom surface of the interlayer dielectric layer, a sidewall of the insulating layer and a top surface of the active layer; the conducting layer is filled arranged in the contact opening and is electrically connected to the active layer.