Microbeam X-ray fluorescence spectrometer
The utility model relates to a microbeam X-ray fluorescence spectrometer. A high-precision laser displacement sensor, the resolution of which is less than 5 microns, is used for detecting the distance between a sample and the laser displacement sensor and converting the signal of the distance H into...
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Zusammenfassung: | The utility model relates to a microbeam X-ray fluorescence spectrometer. A high-precision laser displacement sensor, the resolution of which is less than 5 microns, is used for detecting the distance between a sample and the laser displacement sensor and converting the signal of the distance H into a digital signal through a digital-to-analog conversion card so as to transmit to a computer; the computer transmits the signal to a step motor controller; the step motor controller transmits the signal to a step motor driver; the step motor driver drives a four-dimensional sample platform which is driven by four step motors to move in X, Y, Z and theta directions, so as to ensure that the sample test point to be tested is located at the back focal length position of a capillary C-ray lens. |
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