Cleaning equipment for electronic element cleaning
Cleaning equipment for electronic element cleaning can be applied for camera module or electronic module cleaning. The cleaning equipment for electronic element cleaning comprises a plurality of processing areas and one or a plurality of transmission devices, wherein electronic elements are subseque...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Cleaning equipment for electronic element cleaning can be applied for camera module or electronic module cleaning. The cleaning equipment for electronic element cleaning comprises a plurality of processing areas and one or a plurality of transmission devices, wherein electronic elements are subsequently transmitted to each processing area via the transmission device, so the electronic elements can be orderly processed in the serially-connected processing areas; on one hand, in each processing area, plasma process is conducted to the electronic elements at the atmospheric pressure; on the other hand, the plurality of separately-controlled transmission devices are provided; the electronic elements are processed in the corresponding processing areas at the corresponding processing periods; and at least one processing period is different from other processing periods. |
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