Light supply apparatus of exposure equipment

The utility model discloses a light supply apparatus of exposure equipment. The light supply apparatus comprises fixtures and a plurality of light source modules, wherein the light source modules are arranged on the fixtures side by side, and spacing is formed between every two adjacent light source modules; each light source module comprises a base, a first lens, a first light source unit, a second lens, and a first regulating part or a second regulating part; the base is provided with an accommodating groove; the first lenses are arranged at openings of the accommodating grooves in the bases; the light source units are arranged on the bottom surfaces of the accommodating grooves, and each light source unit is provided with a circuit board and an LED arranged on the circuit board; the second lenses are arranged on the LEDs, and the area of each second lens is smaller than that of each first lens; the first regulating part is connected with the first lens and the base, and the second regulating part is connected with the second lens and the base; light rays emitted by the LEDs of the light source units are reflected by the second lenses to be reflected by the first lenses to present parallel light to be emitted, so that the light supply apparatus has parallel light beams, and an exposure region on an expose plane can receive light intensity which is well-distributed.