Light source module of exposure equipment
The utility model discloses a light supply module of exposure equipment. The light source module comprises a base, a first lens, a light source unit, a second lens, and a first regulating part or a second regulating part, wherein the base is provided with an accommodating groove; the first lens is a...
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Sprache: | eng |
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Zusammenfassung: | The utility model discloses a light supply module of exposure equipment. The light source module comprises a base, a first lens, a light source unit, a second lens, and a first regulating part or a second regulating part, wherein the base is provided with an accommodating groove; the first lens is arranged at an opening of the accommodating groove in the base; the light source unit is arranged on the bottom surface of the accommodating groove, and the light source unit is provided with a circuit board and an LED arranged on the circuit board; the second lens is arranged on the LED, and the area of the second lens is smaller than that of the first lens; the first regulating part is connected with the first lens and the base, and the second regulating part is connected with the second lens and the base; light rays emitted by the LED of the light source unit are reflected by the second lens to be reflected by the first lens to present parallel light to be emitted, so that an exposure region on an expose plane can receive light intensity which is well-distributed. |
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