Apparatus for detecting sensing coefficient of pressure difference sensor by leaking hole
The utility model provides an apparatus for detecting sensing coefficient of a pressure difference sensor by a leaking hole. The apparatus comprises a gas source control valve for control on-off of a gas source, a first pressure stabilizing control valve and a second pressure stabilizing control val...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an apparatus for detecting sensing coefficient of a pressure difference sensor by a leaking hole. The apparatus comprises a gas source control valve for control on-off of a gas source, a first pressure stabilizing control valve and a second pressure stabilizing control valve, wherein the first pressure stabilizing control valve is in parallel with the second pressure stabilizing control valve, the input interfaces of the first pressure stabilizing control valve and the second pressure stabilizing control valve communicate with the output interface of a gas source control valve, the output interfaces of the first pressure stabilizing control valve and the second pressure stabilizing control valve communicate with the pressure chamber on two sides of the pressure difference sensor, the gas path between the second pressure stabilizing control valve further communicates with the input interface of a leaking hole control valve, and the input interface of the leaking hole control valve co |
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