Multilayer DBD (Dielectric Barrier Discharge) low temperature plasma generator

The utility model discloses a multilayer DBD low temperature plasma generator, relating to the technical field of material surface processing. The plasma generator comprises a power source and a DBD plasma reactor, wherein a reaction chamber of the DBD plasma reactor is internally provided with two metal electrodes, one metal electrode is connected with the high voltage output end of the power source, the other metal electrode is grounded, two end surfaces, opposite to the two metal electrodes respectively, are parallel, at least three dielectric plates are arranged between the two metal electrodes, and gaps exist between the adjacent dielectric plates. According to the utility model, uniform and good low temperature plasma can be formed between every two dielectric plates via discharge, film materials can be processed at the two sides of each dielectric plate in the middle, each of the dielectric plates that cover the two electrodes can process one film, the amount and area of the film processed in the singl