SAW (surface acoustic wave) sensor adopting three-dimensional nano-structure

The utility model relates to an SAW (surface acoustic wave) sensor adopting a three-dimensional nano-structure. The SAW sensor comprises a piezoelectric substrate, an input interdigital electrode IDT1, an output interdigital electrode IDT2 and a sensitive area, wherein the input interdigital electro...

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Bibliographische Detailangaben
Hauptverfasser: ZU XIAOTAO, WANG LU, WANG DENGPAN, MA JINYI, DU BO, JIANG HONGMIN, TANG YONGLIANG, SI MEIJU, LI ZHIJIE, YANG JING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model relates to an SAW (surface acoustic wave) sensor adopting a three-dimensional nano-structure. The SAW sensor comprises a piezoelectric substrate, an input interdigital electrode IDT1, an output interdigital electrode IDT2 and a sensitive area, wherein the input interdigital electrode IDT1 and the output interdigital electrode IDT2 are parallelly arranged on the surface of the piezoelectric substrate; the sensitive area is located between the input interdigital electrode IDT1 and the output interdigital electrode IDT2; a three-dimensional nano-structured sensitive membrane is arranged on the sensitive area and comprises modified three-dimensional nano-wires or nano-tubes growing on the sensitive area as well as a sensitive membrane applied to the surface of the sensitive area; and the modified three-dimensional nano-wires or nano-tubes are three-dimensional nano-wires or nano-tubes coated with the sensitive membrane on the outer surfaces. The SAW sensor adopting the three-dimensional nano-str