Electronic beam evaporation device
The utility model provides an electronic beam evaporation device which can inhibit the phenomenon that secondary electrons and reflection electrons generated in electronic beam evaporation enter a substrate and magnet bodies for electronic shielding become shielding objects to obstruct the evaporati...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides an electronic beam evaporation device which can inhibit the phenomenon that secondary electrons and reflection electrons generated in electronic beam evaporation enter a substrate and magnet bodies for electronic shielding become shielding objects to obstruct the evaporation to a crucible and the substrate. An accommodation container (crucible (2)) of an evaporation material is positioned below a substrate (1) for evaporation; in an above space in the direction closer to the center of the substrate than the center of the accommodation container, the pair of magnet bodies are arranged on the two sides of the accommodation container and spaced by a specific interval; the end parts of respective substrate center sides of the pair of magnet bodies (4 (4A, 4B)) are configured to tilt downwards relative to the other end parts. In the situation that the reflection electrons and the secondary electrons which are generated in electronic beam evaporation are radiated to an organic film firstl |
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