Device for reducing polysilicon ingot furnace temperature measurement deviation

The utility model discloses a device for reducing polysilicon ingot furnace temperature measurement deviation. The polysilicon ingot furnace comprises a furnace wall, a heat field, a heat exchange station, a heater, and a quartz crucible, wherein the heat field is arranged at the inner side of the f...

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Bibliographische Detailangaben
Hauptverfasser: GUO KUANXIN, GUO XIAOMENG, SUN HAIZHI, XING GUOQIANG, ZHU SONGTAO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The utility model discloses a device for reducing polysilicon ingot furnace temperature measurement deviation. The polysilicon ingot furnace comprises a furnace wall, a heat field, a heat exchange station, a heater, and a quartz crucible, wherein the heat field is arranged at the inner side of the furnace wall; the quartz crucible is arranged inside the heat field; the outer side of the quartz crucible is arranged at two sides of the heater; and the quartz crucible is arranged below the heat exchange station. The device is characterized by comprising a thermocouple and a constant-temperature box; the thermocouple comprises a hot end of the thermocouple, a cold end of the thermocouple and a leading-out line of the thermocouple; the hot end of the thermocouple extends inside the heat field; the cold end of the thermocouple is exposed out of the furnace wall; the constant-temperature box covers the cold end of the thermocouple; the cold end of the thermocouple is connected with wire; and the wire leads signals of the cold end of the thermocouple out of the constant-temperature box. According to the device for reducing polysilicon ingot furnace temperature measurement deviation, the structure is simple; trhough additionally arranging the constant-temperature box at the cold end of the thermocouple, temperature measurement accuracy of the polysilicon ingot furnace can be effectively improved, the beneficial effects are obvious, and industrial production is facilitated.