Full-automatic standard gas preparation device
The utility model discloses a full-automatic standard gas preparation device which comprises a high-pressure bottom gas pipeline, a standard gas distribution bottle, a constant temperature room, a raw material gas pipeline and a vacuum pump, wherein a six-way valve and a quantitative pipe are arrang...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The utility model discloses a full-automatic standard gas preparation device which comprises a high-pressure bottom gas pipeline, a standard gas distribution bottle, a constant temperature room, a raw material gas pipeline and a vacuum pump, wherein a six-way valve and a quantitative pipe are arranged in the constant temperature room; the high-pressure bottom gas pipeline, the standard gas distribution bottle, the raw material gas pipeline, the quantitative pipe and the vacuum pump are connected with the six-way valve in parallel, and the high-pressure bottom gas pipeline is connected with the standard gas distribution bottle in series; a pressure sensor is arranged at the gas inlet end of the standard gas distribution bottle, and a mass flow meter is arranged on the raw material gas pipeline; the output ends of the pressure sensor and the mass flow meter are respectively connected with a computer in parallel; an electromagnetic valve is arranged on each of the high-pressure bottom gas pipeline and the raw material gas pipeline and controlled through the computer. As the standard gas distribution bottle adopts a cylinder and is matched with a linear motor, the gas tightness of the cylinder is good, the preparation content is accurate, and the preparation efficiency is high. Prepared standard gas is a first-level national standard material. |
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