Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination

The utility model discloses a flexible three-dimensional force tactile sensor based on a piezoresistive and capacitive combination. The flexible three-dimensional force tactile sensor comprises an elastic substrate for supporting, a flexible circuit lower layer, a three-dimensional force sensitive array filled with flexible filter around, a flexible circuit upper layer, and an elastic protruding layer for protection, the five portions form a three-dimensional force sensor component advantaged by compact structure, and each three-dimensional force sensitive unit is simultaneously integrated with vertically-arranged force sensitive strain gauges and four sets of vertically-arranged induction capacitors which are respectively sensitive to the vertical formally force and the vertical tangential force. According to the flexible three-dimensional force tactile sensor, characteristics of static nature and dynamic nature are provided, the interference from capacitance coupling caused by external surface metals with t