A polycrystalline silicon glue removal cleaning water tank based on an external circulation type water heating system
The utility model discloses a polycrystalline silicon glue removal cleaning water tank based on an external circulation type water heating system. The polycrystalline silicon glue removal cleaning water tank comprises a water tank body internally filled with water for silicon wafer cleaning, a tempe...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model discloses a polycrystalline silicon glue removal cleaning water tank based on an external circulation type water heating system. The polycrystalline silicon glue removal cleaning water tank comprises a water tank body internally filled with water for silicon wafer cleaning, a temperature detection unit for real-time detection of water temperature in the water tank body, and the external circulation type water heating system used for heating the water in the water tank body. The external circulation type water heating system comprises a heating cabinet; the heating cabinet is communicated with the water tank body through a water circulating pipeline; a circulating pump is installed on the water circulating pipeline; the heating cabinet comprises a cabinet body and an electric heater arranged in the cabinet body; the temperature detection unit is connected with a signal collection circuit which is connected with a temperature controller; the electric heater is controlled by the temperature con |
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