System for producing trichlorosilane by anti-disproportionation reaction of dichlorosilane

The utility model belongs to the technical field of the chemical industry and relates to a system for producing trichlorosilane by anti-disproportionation reaction of dichlorosilane and in particular relates to a system for generating trichlorosilane by anti-disproportionation reaction of dichlorosi...

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Bibliographische Detailangaben
Hauptverfasser: SHI ZHIBAO, CHEN JIANXIANG, MA YINGLI, CHEN ZENG, QIN YONGHONG, WANG GUOZHENG, CHANG CHENGSHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model belongs to the technical field of the chemical industry and relates to a system for producing trichlorosilane by anti-disproportionation reaction of dichlorosilane and in particular relates to a system for generating trichlorosilane by anti-disproportionation reaction of dichlorosilane, namely a byproduct generated in a trichlorosilane production process. The system is characterized in that a light component rectifying column is communicated with a light component storage tank, a first filter, a first power pump and a mixer in sequence; a silicon tetrachloride storage tank is communicated with a second filter, a second power pump and the mixer in sequence; the mixer is communicated with a fixed bed reaction column via a heater and a basket filter in sequence; the fixed bed reaction column is communicated with a synthetic fluid storage tank via a first cooler and a second cooler in sequence; the synthetic fluid storage tank is communicated with a third-level rectifying column. The system enab