Phosphine gas monitoring device and phosphine gas purification system

The utility model provides a phosphine gas monitoring device and a phosphine gas purification system. The monitoring device comprises a detection unit, a control unit and an adjustment unit, wherein the detection unit is connected with the control unit and is used for detecting concentration of phos...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI DEHUA, QIU XIANNIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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