Phosphine gas monitoring device and phosphine gas purification system
The utility model provides a phosphine gas monitoring device and a phosphine gas purification system. The monitoring device comprises a detection unit, a control unit and an adjustment unit, wherein the detection unit is connected with the control unit and is used for detecting concentration of phos...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The utility model provides a phosphine gas monitoring device and a phosphine gas purification system. The monitoring device comprises a detection unit, a control unit and an adjustment unit, wherein the detection unit is connected with the control unit and is used for detecting concentration of phosphine gas discharged by the phosphine gas purification system and sending an obtained detection value of the phosphine gas concentration to the control unit; the control unit is connected with the adjustment unit and is used for comparing the detection value of the phosphine gas strength with a default concentration safe range in the control unit and sending an adjustment command to the adjustment unit according to a comparison result; and the adjustment unit is used for adjusting gas input amount of the phosphine gas purification system according to the adjustment command of the control unit. The phosphine gas monitoring device and the phosphine gas purification system can monitor the phosphine gas concentration a |
|---|