Magnetron sputtering anti-short-circuiting pressing block for rectangular plane target

The utility model discloses a magnetron sputtering anti-short-circuiting pressing block for a rectangular plane target. The magnetron sputtering anti-short-circuiting pressing block comprises a pressing block main body, wherein a mounting hole is formed in the pressing block main body. The magnetron...

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Bibliographische Detailangaben
Hauptverfasser:	NIAN ZHIGANG, LIU ZHIBIAO, DU FU, JIANG XINBO, LAI SHANCHUN, ZHOU JIAN, BAO LIQIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a magnetron sputtering anti-short-circuiting pressing block for a rectangular plane target. The magnetron sputtering anti-short-circuiting pressing block comprises a pressing block main body, wherein a mounting hole is formed in the pressing block main body. The magnetron sputtering anti-short-circuiting pressing block is characterized in that a slope is formed on the top of the pressing block main body, and a ladder for fixing the rectangular plane target is arranged at the bottom of the pressing block main body. The magnetron sputtering anti-short-circuiting pressing block can be formed by machining a conventional pressing block, is simple in structure, convenient to manufacture and low in production cost and can be used for ensuring the stability of the installation structure of the target and effectively preventing the short-circuiting fault from occurring to the target.