Silicon slice transmission manipulator controller for lithography machine

The utility model provides a silicon slice transmission manipulator controller for a lithography machine. The silicon slice transmission manipulator controller comprises a system control module, a DSP (digital signal processing) movement control module, a drive control module and four power amplification modules, wherein the system control module and the DSP movement control module finish data communication via an HPI (host port interface); the DSP movement control module and the drive control module finish data communication by applying an EMIF (external memory interface); and the drive control module and the four power amplification modules finish data communication by applying an XINTF (external system interface). According to the silicon slice transmission manipulator controller provided by the utility model, a connection back plate can be removed, and a decision-making layer, a processing layer and an execution layer are integrated on a board card, thus reducing the occupied space of the manipulator cont