Novel ion beam compound treatment system
The utility model discloses an ion beam compound treatment system which comprises a vacuum chamber, a mixed ion beam injection device, a magnetron sputtering target and an ion sputtering source. The system provided by the utility model, which combines the magnetron sputtering and ion injection techn...
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| creator | ZENG YONGYUAN XIE ZHAOJUE ZHOU HONGYU |
| description | The utility model discloses an ion beam compound treatment system which comprises a vacuum chamber, a mixed ion beam injection device, a magnetron sputtering target and an ion sputtering source. The system provided by the utility model, which combines the magnetron sputtering and ion injection technologies, has the function of gas ion injection, metal ion injection and compound ion injection, so that the system is suitable for surface modification of metal materials, optical films, conductive films, semiconductor materials and the like, and has higher practical value. |
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The system provided by the utility model, which combines the magnetron sputtering and ion injection technologies, has the function of gas ion injection, metal ion injection and compound ion injection, so that the system is suitable for surface modification of metal materials, optical films, conductive films, semiconductor materials and the like, and has higher practical value.</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130731&DB=EPODOC&CC=CN&NR=203096158U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130731&DB=EPODOC&CC=CN&NR=203096158U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZENG YONGYUAN</creatorcontrib><creatorcontrib>XIE ZHAOJUE</creatorcontrib><creatorcontrib>ZHOU HONGYU</creatorcontrib><title>Novel ion beam compound treatment system</title><description>The utility model discloses an ion beam compound treatment system which comprises a vacuum chamber, a mixed ion beam injection device, a magnetron sputtering target and an ion sputtering source. 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The system provided by the utility model, which combines the magnetron sputtering and ion injection technologies, has the function of gas ion injection, metal ion injection and compound ion injection, so that the system is suitable for surface modification of metal materials, optical films, conductive films, semiconductor materials and the like, and has higher practical value.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Novel ion beam compound treatment system |
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