Robot arm structure and robot

The utility model provides a robot arm structure and a robot. The robot is installed into a vacuum chamber maintained at a decompression state. The arm structure comprises a first arm, a second arm and end effectors forming a maintenance workpiece, wherein the first arm is provided with a predetermi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KOHARA ISAKI, HIROAKI TADATAKA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	The utility model provides a robot arm structure and a robot. The robot is installed into a vacuum chamber maintained at a decompression state. The arm structure comprises a first arm, a second arm and end effectors forming a maintenance workpiece, wherein the first arm is provided with a predetermined driving system arranged in the first arm, and the interior of the first arm is maintained at an atmospheric pressure state; the second arm is not provided with any driving system; a partition wall is arranged adjacent to the joint of the first arm and the second arm, so as to isolate the atmospheric pressure state maintained in the first arm from the decompression state; and the partition wall is internally provided with an airtight terminal, so as to enable an atmospheric side and a vacuum side to be electrically connected at the airtight state.