Control system of copper-indium-gallium-diselenide thin film battery

The utility model relates to a control system of a copper-indium-gallium-diselenide thin film battery, and in particular relates to a control system in a process for preparing the copper-indium-gallium-diselenide thin film battery by a coevaporation method. The system comprises a vacuum chamber, an...

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Bibliographische Detailangaben
1. Verfasser:	YU SUHAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	The utility model relates to a control system of a copper-indium-gallium-diselenide thin film battery, and in particular relates to a control system in a process for preparing the copper-indium-gallium-diselenide thin film battery by a coevaporation method. The system comprises a vacuum chamber, an evaporating source, a substrate, a heating module and a control system. The control system just comprises a temperature control system. According to the control system characterized by temperature change, the preparation process of the copper-indium-gallium-diselenide thin film battery is low in cost, and the quality of a CIGS (Copper Indium Gallium Diselenide) thin film prepared by the system is directly affected by the control system.