Bearing unit

The utility model relates to a bearing unit. The bearing unit comprises a base plate body and a bearing body, wherein the bearing body is arranged on the top wall of the base plate body; the base plate body comprises a gas flow way and an inlet, wherein the gas flow way is communicated with the outs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG YIDA, LIU ANJUN, SHAO RENMIN, HUANG ZHIWEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a bearing unit. The bearing unit comprises a base plate body and a bearing body, wherein the bearing body is arranged on the top wall of the base plate body; the base plate body comprises a gas flow way and an inlet, wherein the gas flow way is communicated with the outside through the inlet; the bearing body comprises a plurality of through holes and a plurality of outlets; the through holes are formed in an arraying way and communicated with the gas flow way; and each through hole comprises a large-hole-diameter part, a small-hole-diameter part and a shoulder part, wherein the hole diameter of the small-hole-diameter part is smaller than the hole diameter of the large-hole-diameter part, and the shoulder part is defined between the large-hole-diameter part and the small-hole-diameter part. The bearing unit provided by the utility model is used for bearing a crucible with a plurality of seed crystal groups. Due to the design of the gas flow way and the through holes with large-ho