Compound calibration standard sample

The utility model discloses a compound calibration standard sample and a calibration method. The compound calibration standard sample comprises a matrix possessing an upper end surface and a lower end surface. The lower end surface is an installation bottom surface; the upper end surface is a test end surface which is provided with at least two steps; the steps are provided with horizontal step surfaces which are provided with standard gratings or standard surface roughness. The compound calibration standard sample and calibration method have the characteristics of a compact structure and a small volume, are convenient for storage, can minimize the measurement indeterminacy influence quantity introduced by standard sample replacement, different material characteristics, etc., raise calibration precision and are in favor of scanning electron microscope three-dimensional space measurement and calibration and function expansion.