Continuous chemical vapor deposition equipment of materials for lithium ion battery
The utility model discloses continuous chemical vapor deposition equipment of materials for a lithium ion battery, which aims to solve the technical problem of precisely controlling the film thickness of a coating layer. The continuous chemical vapor deposition equipment is provided with a reaction...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses continuous chemical vapor deposition equipment of materials for a lithium ion battery, which aims to solve the technical problem of precisely controlling the film thickness of a coating layer. The continuous chemical vapor deposition equipment is provided with a reaction chamber, a transmission device and a depositing device. The reaction chamber is a moveable device, the transmission device is a conveying circulating transmission machine, and the whole transmission device is arranged through flow channels which are respectively a preheating section, a depositing section and a cooling section opened at both ends and sealed around. Compared with the prior art, the transmission device and the movable reaction chamber are adopted to realize automatic chemical vapor deposition process, so that reaction gases can be contacted with the surfaces of a powder substrate, and finally, uniform crystallized thin layers are formed on the surfaces, therefore, the machining process to coat the pow |
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