Power supply circuit for heater

The utility model relates to a power supply circuit for a heater. The power supply circuit is used for heating an electrostatic chuck in a plasma treatment device, the electrostatic chuck is positioned in a reaction chamber of the plasma treatment device and used for fixing a part to be processed, the plasma treatment device is externally connected with a radio-frequency power supply, and the radio-frequency power supply comprises electric signals with at least one frequency and is used for applying radio-frequency power to the reaction chamber. The power supply circuit for the heater comprises the heater, an alternating-current power supply and a plurality of inductors, wherein the heater is used for heating the part to be processed, the alternating-current power supply is connected with the heater and used for supplying power to the heater, the inductors are serially connected with the heater, and each inductor is used for shielding leakage current generated when the electric signal with a specific frequenc