Low-frequency vibration acceleration transducer system based on MEMS technology

The utility model discloses a low-frequency vibration acceleration transducer system based on MEMS technology. The low-frequency vibration acceleration transducer system comprises a sensing element of the acceleration transducer based on MEMS technology, a signal transmission line, a low-pass filter...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG QINGMIN, YANG YAOEN, LI ZHENTAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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