Low-frequency vibration acceleration transducer system based on MEMS technology

The utility model discloses a low-frequency vibration acceleration transducer system based on MEMS technology. The low-frequency vibration acceleration transducer system comprises a sensing element of the acceleration transducer based on MEMS technology, a signal transmission line, a low-pass filter...

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Bibliographische Detailangaben
Hauptverfasser: WANG QINGMIN, YANG YAOEN, LI ZHENTAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a low-frequency vibration acceleration transducer system based on MEMS technology. The low-frequency vibration acceleration transducer system comprises a sensing element of the acceleration transducer based on MEMS technology, a signal transmission line, a low-pass filter circuit and an analogue-to-digital conversion circuit, wherein the signal input end of the sensing element of the acceleration transducer based on MEMS technology is used for sensing vibration signals of an external structure, and the signal output end is connected with the signal input end of the low-pass filter circuit through the signal transmission line; and the signal output end of the low-pass filter circuit is used for connecting with a microprocessor circuit of a data acquisition device through the analogue-to-digital conversion circuit. The low-frequency vibration acceleration transducer system is simple in structure, has good test dynamic response, high test precision, good repeatability and stability, a