Composite ceramic chamber lining

The utility model relates to a mechanical part. The utility model aims at providing a chamber lining with high abrasion resistance. The composite ceramic chamber lining provided by the utility model comprises an inner core, wherein a metal ceramic layer is generated on the outer surface of the inner...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN DAHAI, WANG DAYONG, ZHU KAIRONG, REN SHIFU, TANG XIAO, YANG ZHIZHU, ZUO SHENBING, FANG JIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a mechanical part. The utility model aims at providing a chamber lining with high abrasion resistance. The composite ceramic chamber lining provided by the utility model comprises an inner core, wherein a metal ceramic layer is generated on the outer surface of the inner core in a permeating way by adopting a vacuum ultramicro low temperature plasma chemical meteorology deposition technology, and according to the composite ceramic chamber lining provided by the utility model, the abrasion resistance can be well improved.