Acidic molybdenum-aluminum-molybdenum etchant preparation system

The utility model relates to an acidic molybdenum-aluminum-molybdenum etchant preparation system, which comprises a phosphoric acid storage tank (1), an acetic acid storage tank (2), a nitric acid storage tank (3), a first cation exchange resin tank (4), a second cation exchange resin tank (5), a th...

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Bibliographische Detailangaben
Hauptverfasser:	SHENG JIANWEI, SHEN CUIFEN, GE SHIYONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
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Beschreibung
Zusammenfassung:	The utility model relates to an acidic molybdenum-aluminum-molybdenum etchant preparation system, which comprises a phosphoric acid storage tank (1), an acetic acid storage tank (2), a nitric acid storage tank (3), a first cation exchange resin tank (4), a second cation exchange resin tank (5), a third cation exchange resin tank (6), a mixing tank (7), a diaphragm pump (8), an ultrafiltration device (9) and a finished product tank (10). According to the utility model, phosphoric acid, acetic acid and nitric acid are processed by ion exchange resin, then mixed and subjected to ultrafiltration through an ultrafiltration member to ensure small granularity of the etchant, low content of particle impurities and high purity.