Basketry for cleaning machine

The utility model relates to a basketry for a cleaning machine, belonging to the silicon wafer cleaning field. The basketry comprises a basketry body, a pin and a conductive body, wherein the middle part of the frame on two ends of the basketry body are fixedly provided with two polysilicon flower b...

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Bibliographische Detailangaben
Hauptverfasser: ZHOU JIXUN, ZHU XIAOLEI, ZHI XUQIANG, HUO DESHENG, GU JINSHENG, ZHANG LEI, NIE CHUANFU, ZHI BINGQIANG, REN ZUJIANG, DENG ZHANPENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to a basketry for a cleaning machine, belonging to the silicon wafer cleaning field. The basketry comprises a basketry body, a pin and a conductive body, wherein the middle part of the frame on two ends of the basketry body are fixedly provided with two polysilicon flower basket pins with an interval; the lower part surface of the upper frame on the two ends of the basketry body is movably connected with two monocrystalline silicon flower basket pins which are arranged at the two sides of the two polysilicon flower basket pins; the opposite angle positions of the end surfaces of the two ends of the basketry body are respectively provided with a baffle corresponding to the sensing device in the cleaning machine; and the corner end of the lower frame of the basketry body is provided with a grounding conductive body. The basketry not only can hold the monocrystalline silicon flower basket and the polysilicon flower basket, but also can avoid flower basket dumping or pressing situation i